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2026-2027 Academic Catalog
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SEMI 1000 - Introduction to Vacuum Systems Technology

Credits: 3 Lecture: 2 Lab: 2

In this course, students will be introduced to the operational mechanisms and process use of vacuum pumps used in the semiconductor industry. Students will explain the operational methodology and process use of equipment that require vacuum pumps used in the semiconductor industry. Students will demonstrate problem solving, critical thinking and communication skills while learning how to perform maintenance on a vacuum system.

Prerequisite: None

Course Classification: T


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